摘要
本文提出了一种新的方法,多普勒外差法测量表面面形,并首次提出和制作了同步相位计。测量过程由微机控制进行。还讨论了探测器阵列的相位特性评价。
This paper describes a new method, Doppler heterodyne measurement method of surface profile, using a simultaneous phase comparator. The measurement is controled by microco- mputer. This paper also discusses the evaluation of the phase character of detector array.
出处
《光学机械》
CSCD
1989年第2期37-38,共2页
