摘要
本文介绍了采用原子发射光谱分析技术直接分析光学介质膜的新途径,建立了一套取样,激发和标样制备方法,测定了TiO_2-Ta_2O_5混合膜中Ta,Ti元素的含量比。
A method using usual instrument of AES to driectly analyse thin optical medium film has been presented. The main work to do this is to set up a series of methods of getting sample, exiting sample and making standard sample. An example for determining the rate of Ta. Ti content in the TiO_2-Ta_2O_5 mixing film has been given.
出处
《光学机械》
CSCD
1989年第1期68-74,共7页
基金
国家自然科学基金
