摘要
炫耀光栅位移测量系统采用尤学倍增与电子细分相結合的方法,使系统的分辨率达到0.4微米。与金属线纹尺比较测量,系统在300毫米内的极限误差为1.5微米。试验证明炫耀光栅位移测量系统具有较高的精度,如能进一步提高标尺光栅的刻划精度,并相应地提高分辨率,系统的实际精度还可以提高。
By applying optical multiplication and electronic subdivision to measuring system for flaunting grating displacement, the system resolution has reached 0.4μm. Compared with measurement of metal linear scale, the limited error of the system is 1.5μm within 300mm. Experiments show that the measuring system has higher accuracy. If the division accuracy of the scale grating can be improved, the resolution can be improbed correspondingly, then the practical accuracy of the system can be further raised.
出处
《光学工程》
CSCD
1989年第6期57-60,22,共5页
