摘要
报道了一种以ＺｒＯＣｌ２·８Ｈ２Ｏ为源，溶胶一凝胶法制备高激光负载高折射率薄膜的新方法。薄膜采用旋转镀膜法制备，对薄膜的结构、光学特性及激光损伤阈值进行了测量，有机粘接剂对薄膜折射率及机械强度的影响也作了探讨。以该薄膜与ＳｉＯ２溶胶一凝胶膜交替涂覆制成的多层高反膜，剩余透过率仅０．９８％，激光损伤阈值达１６Ｊ／ｃｍ２（３ｕｓ）。
Optic thin film with high refractive index and high laser damage threshold was preparedfrom ZrOC12. SH2O with sol-gel process. The film was prepared with spin coating method. The structure,optical properties and laser damage threshold of the films were investigated. The influences of organic binderto the refractive index and the mechanic strength of the films were also studied. A minimum transmittance ofless than 1% near 1064urn was obtained from the present [SiO2/ZrO2]10-multilayer HR coatings, meanwhilea laser damage threshold of more than 16J/cm' was achieved using high power laser at wavelength of 1064urnand pulse width of 2.5ns.
出处
《强激光与粒子束》
EI
CAS
CSCD
北大核心
1999年第5期609-612,共4页
High Power Laser and Particle Beams
基金
国家自然科学基金
国家863惯性约束聚变领域及青年科学基金
关键词
水热法
溶胶
高折射率
薄膜
制备
hydrothermal synthesis
soi
high refractive index
film
