摘要
通过比较实测与计算所得整体材料纳米压入加载曲线及Berkovich压头的面积函数,对已建立的Berkovich压头绝对钝化量的确定方法进行了实验验证。在此基础上,测定了蒸发镀制在Si单晶上三种不同膜厚Al膜的屈服强度和硬化指数。并与拉伸分离法获得的结果进行了比较。结果表明,利用纳米压入加载曲线确定陶瓷基体上金属薄膜基本力学性能的方法是可行的。
By comparing the loading curve for bulk material and the cross section area of Berkovich indenter measured by experiments with those calculated by FEM, the validity of the method for determining the bluntness value of the indenter is examined. And then, the functional equations for obtaining the mechanical properties of metal films are employed to determine the yield strengths and hardening indices of Al films deposited on Si substrate, Furthermore, the stress-strain curves of A1 films on Si substrate can be obtained in terms of the yield strengths and hardening indices. From the result of comparing one of above stress-strain curves of A1 films with that determined by a dissociated method of uniaxial tensile test with Al film deposited ou an Al foil, it was shown that the method for obtaining the mechanical properties of metal films on ceramic substrate from nanoindentation loading curve is feasible.
作者
马德军
徐可为
何家文
MA Dejun;XU Kewei;HE Jiawen(State Key Laboratory for Mechanical Behavior of Materials,Xi'an Jiaotong University,Xi'an 710049)
出处
《金属学报》
SCIE
EI
CAS
CSCD
北大核心
1999年第10期1049-1052,共4页
Acta Metallurgica Sinica
基金
国家自然科学基金59571031和59731020资助项目
中法PRA合作研究项目
