摘要
本文采用非金属醇盐以醋酸镁为起始原料，胶棉液为添加剂，在Ｓｉ（１００） 衬底上成功地制备了ＭｇＯ 薄膜。结果表明，薄膜的晶体结构与胶棉液的含量及退火温度有关。同时，用Ｘ射线衍射（ ＸＲＤ） 、原子力显微电镜（ＡＦＭ） 和透射电镜（ ＴＥＭ） 对薄膜的微观结构进行了分析。这种制备ＭｇＯ 薄膜的新方法还未见有报道。
In this research,MgO thin films have been successfully prepared on Si substrate by a novel and simple sol-gel method.The results indicated that the structures of MgO films were closely related to the amount of collodion and the annealing temperature.In addition,the microstructure of the MgO thin films were examined with X-ray diffraction (XRD),Atomic Force Morphology (AFM) and Transmission Electron Micrograph (TEM). To our knowledge,such a new method to prepare MgO thin films has not been reported previously.
出处
《功能材料》
EI
CAS
CSCD
北大核心
1999年第6期631-632,共2页
Journal of Functional Materials
