摘要
根据扩散硅压力传感器灵敏度温漂产生的原理，分析了灵敏度与温度的关系。并依据实验数据论述了灵敏系数和扩散表面杂质浓度的关系以及电阻温度系数与表面杂质浓度的关系。简单介绍通过调整和控制表面杂质浓度等参数，得到所需的灵敏度温度漂移曲线。
The sensibility correlation with temperature has been analyzed on the base of the principle of creating sensitivity temperature shifting in piezoresistive pressure sensors.The sensitive coefficient correlation with surface dopant concentration and resistance temperature coefficient correlation with surface dopant concentration has been discussed in light of experience data,respectively.The paper introduces briefly to adjust and control some parameters,such as surface dopant concertration to attain necessary curve of sensitivity temperature shifting.
出处
《仪表技术与传感器》
CSCD
北大核心
1999年第11期1-2,18,共3页
Instrument Technique and Sensor
基金
国家"九五"科技攻关项目
关键词
灵敏度
温度漂移
扩散硅
压力传感器
传感器
Sensitive Coefficient,Temperature Shifting of Sensitivity,Resistance Temperature Coefficient,Surface Dopant Concentration
