摘要
在低温（＜１００℃）、低压（３×１０－３Ｐａ）下，以ＣＨ４／Ａｒ混合气体形成的单离子束对低碳钢表面轰击，结果钢表面生成厚度为９０～１４０ｎｍ的薄膜，由纳米硬度计测出硬度为２１～２９ＭＰａ．作ＳＥＭ分析，在放大１８０００倍下仍观察不到薄膜晶界；ＡＥＳ分析表明其主要成分为碳；复由激光拉曼谱分析证实，这是一种非晶态的同时含ｓｐ３和ｓｐ２键的类金刚石薄膜．
Substrates of mild steel were bombarded by a single ion beam with a mixed gas of methane and argon as source. The deposition process was carried out at temperature lower than 100 ℃ and low pressure around 3×10 -3 Pa. Thin film with thickness in a range of 90～140 nm and hardness of 21～29 MPa was successfully deposited on the substrates. No any evidence under SEM analysis was found which, even at magnification of 18 000 , shows the existence of grain boundary. The result of AES analysis reveals a predominant carbon content, and of Raman Spectrum confirms an amorphous structure with fourfold and threefold coordinated sp 3 and sp 2 carbon atoms.
出处
《煤炭学报》
EI
CAS
CSCD
北大核心
1999年第4期445-448,共4页
Journal of China Coal Society
基金
96'国家留学基金
