摘要
为提高电容器用铝箔的比电容并降低传统刻蚀铝箔生产过程中的环境污染,采用多弧离子镀技术制备了一种新的电容器,用TiCN/Al复合铝箔电极材料,研究了C2H2和N2流量比及沉积后冷却方式对TiCN/Al复合铝箔比电容的影响.通过扫描电镜和X射线衍射分析了不同温度下铝箔表面的微观结构和物相变化规律,探讨了TiCN/Al复合铝箔的比电容对温度的敏感性.研究结果表明:多弧离子镀技术制备的TiCN/Al复合铝箔的比电容高达1600μF/cm2,比传统的刻蚀工艺铝箔约提高2倍;TiCN/Al复合铝箔具有较强的温度敏感性,随温度的升高,铝箔表面TiCN涂层颗粒有逐渐长大的趋势,晶体结构也从非晶态向晶态转变,温度高于200℃时,比电容下降较快.
To improve the specific capacitance of the capacitor foil and reduce the environmental pollution of traditional etching process,a new TiCN/Al composite foil for capacitor was prepared by multi-arc ion plating method.The effects of cooling process and Flow ratio of C2H2 and N2 for deposition on specific capacitance were investigated.By using SEM and XRD,the surface micrograph and phase transformation were analyzed and the temperature sensitivity of specific capacitance was discussed.Results show that the specific capacitance of TiCN/Al composite foil is 1600 μF/cm2,two times higher than that of the aluminum foil prepared by traditional etching process,and the composite foil has strong temperature sensitivity.With the temperature increased,the TiCN particles on the foil surface tend to grow up,and the crystal structure change from amorphous to crystalline.When the temperature is higher than 200 ℃,the specific capacitance decreases more quickly.
出处
《材料科学与工艺》
EI
CAS
CSCD
北大核心
2011年第1期76-79,共4页
Materials Science and Technology
基金
湖北省教育厅重点科技资助项目(D20091107)
关键词
多弧离子镀
电容器
铝箔
比电容
multi-arc ion plating
capacitor
aluminum foil
specific capacitance
