摘要
重点综述了前驱体、基片和热处理工艺等因素对sol-gel法制备的钛酸锶钡BST(Ba1-SrxTiO3)铁电薄膜的晶x化行为及介电性能的影响,并从动力学和热力学角度进行了解释,进而提出一些实用措施:选用低温分解的羧酸盐和加有螯合剂的钛醇盐作原料、采用与BST晶格匹配度好的基片、提高升温速率、加入晶种或理想的添加剂等,来消除或减弱中间相的影响以实现低温下高介电性能的BST薄膜的sol-gel制备;最后,提出了研究中需进一步解决的课题。
The influences of the precursors, the substrate and the heat-treatment process on dielectric properties and crystallization behaviors of barium strontium titanate (Ba1- SrxTiO3(x=0~1, BST)ferroelectric thin films by a sol-gel method x were discussed emphatically and systematically, and interpretations were thermodynamically and kinetically given. In order to prepare BST thin films with excellent dielectric properties successfully under a relatively low treatment temperature by eliminating or weakening the effects of the intermediate phase, some practical solutions were brought forward: low-temperature decomposing carboxylate and chelated titanate as starting materials, substrate with little lattice mismatch, RTA, seeding, suitable additive and so on. Finally, the problems that must further be resolved in near future are also singled out.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2005年第3期54-58,共5页
Electronic Components And Materials
基金
国家"863"计划资助项目(2003AA325030)
教育部优秀青年教师教学与科研奖励计划资助项目
关键词
无机非金属材料
钛酸锶钡
溶胶-凝胶
综述
晶化行为
中间相
钙钛矿相
inorganic non-metallic materials
BST
sol-gel
review
crystallization behavior
intermediate phase
perovskite phase
