摘要
作者利用自制的自动划痕试验仪对通过等离子增强化学气相沉积法(PECVD)制备的TiN和TiC镀层进行了划痕试验,考察了底材硬度、镀层厚度、镀层硬度、加载速率、划痕速度及压头(亦称划针)、与镀层间的摩擦状况等因素对表征镀层结合强度的临界载荷的影响。结果表明,临界载荷随底材硬度及镀层硬度的增加而增大,镀层厚度存在一个最佳值,在此值下的临界载荷最大,当加载速率高于100N/min时,临界载荷基本不再受其影响,临界载荷与划痕速度无关,镀层上覆盖固体润滑剂可使临界载荷增大,而覆盖纯油对临界载荷没有影响。
The scratch test for PECVD TiNand TiC coatings using a self-made automatic scratch tester has been, conducted by the authors. The influences of substrate hardness, coatisng hardne,ss, coating thickness, loading rate, scratch speed and the, friction i state between the indenter ( scratcher) and coatings on critical, load,which cha-
racters the adhesive strength of coatings, have been studied. The results show that the critical loads of hard coatings increase:s1w.ith increasing of substrate hardness and coating hardness,but with .an optimum coating thipkn.ess, the maximum critical load exists. Since loading rate is higher tluwi 100 N/min, it has no effect on critical load. The critical load is independent of the scratch speed. A solid lubricant film on hard coating can increase its critical load, but a lubricating oil does not have this effect.
出处
《固体润滑》
CSCD
北大核心
1989年第4期224-229,共6页
