摘要
电涡流传感器因非接触测量、抗干扰力强等优点在生产中得到了广泛地应用，但其精度很难到达几个微米。根据精度分析理论，采用误差修正技术，提出“最小区间数”与“最大区间段”的工作区间优选原则，确定电涡流传感器的最佳工作区间，以提高传感器测量精度。应用该方法对商业电涡流传感器进行了精度标定，结果显示，将原有的电涡流传感器±10μm误差提升至最佳工作区间的±4μm精度。
Electric eddy sensor is widely used in industry because of its non-contact measurement and strong antiinterference. However,its accuracy is difficult to reach the level of a few micron. Interval optimization judgment principles is proposed on the bases of the accuracy analysis theory and the error correction technology, including ＂ minimum interval number＂ principle and ＂maximum interval ranges＂ principle, to determine the optimal working ranges of electric eddy sensor and improve the sensor measurement accuracy. The above principles is applied to the commercial electric eddy sensor to obtain the precision promotion,the resuh shows that the original accuracy of±10μm error is improved to ±4μm error in the best working range of eddy current sensor.
出处
《计量学报》
CSCD
北大核心
2011年第3期239-243,共5页
Acta Metrologica Sinica
基金
国家科技重大专项（2009ZX04014-023-02）
国家重点实验室开放课题（2010006）
关键词
计量学
电涡流传感器
误差修正
最小二乘法
Metrology
Electric eddy sensor
Error correction
Least square method
