摘要
在长距离直线度、同轴度测量时,光线漂移是影响激光准直精度的最主要因素。本文提出了一种差分补偿光线漂移的方法。分光器用作位置敏感器件,利用两个四象限探测器分别探测分光器的第一次反射光和通过猫眼逆向反射再经过分光器的第二次反射光,最后利用差分方式消除光束漂移对光线基准的影响。实验结果表明:在8-18 m的距离范围内,漂移误差补偿效果为35.0-57.0%之间。
Beam drift is the uppermost factor that affects the accuracy of the propagating direction of a laser beam.It causes serious error in laser straightness or coaxiality measurement at a long distance.A novel differential compensation approach for laser beam drift is put forward in this paper.A beam splitter was used as a position-sentivie part.The first reflected beam from the splitter was detected using a four-quadrant detector.The second reflected beam from reverse direction by the splitter was detected using another four-quadrant detector,after it had been reflected by a cat′s eye reflector.The beam drift influence on beam collimation can be eliminated by combining the two detectors.Experimental results show that the additional position error induced by beam drift can be reduced by about 35.0-57.0% in the range of 8-18 m distance.
出处
《光电子.激光》
EI
CAS
CSCD
北大核心
2011年第4期597-599,共3页
Journal of Optoelectronics·Laser
基金
浙江省自然基金资助项目(Y1100408)
现代光学仪器国家重点实验室基金资助项目
关键词
差分补偿
光线漂移
激光准直
激光测量
differential compensation
beam drift
laser collimation
laser measurement