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采用压电陶瓷驱动器的高频像移补偿系统 被引量:3

High frequency motion compensation system based on PZT actuator
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摘要 针对成像光谱仪提出了基于压电陶瓷(PZT)驱动器的高频像移补偿技术以提高其成像质量。结合成像系统,分析了像移补偿系统需求,给出了该系统的控制策略和设计方案。针对PZT驱动器大容性负载给出了驱动器的设计方法,能够实现系统所需的高频大信号电压驱动;采用基于AD698集成芯片的信号调理电路和线性差分变压式传感器(LVDT)获得高精度补偿角度信息;针对PZT的迟滞特性采用基于DSP控制器的数字闭环控制实现高精度控制。测试数据说明此系统已达到所需像移补偿速度精度要求,表明了此方案的可行性和实用性。 A high frequency motion compensation system which was based on PZT actuator and used to improve the quality of a spectrograph was presented.Requirement of the compensation system was analyzed and the design scheme and control strategy were proposed to satisfy the performance specifications.According to the large capacity,a high power and high frequency PZT actuator driver was designed which could provide the high frequency signal coltage drive.High accuracy signal conditioning circuit based on AD698 and linear variable differential transformer(LVDT) sensor was designed to get the angle of the compensation mirror.Closed-loop control strategy based on DSP was used to eliminate the error caused by PZT′s hysteresis and creep effect.Autocollimator was used to test the signal conditioning circuit.Error between fitting result of the circuit and autocollimator output was presented.LVDT conditioning circuit output voltage and PZT drive voltage when the compensation system worked were sampled and analyzed.The experimental results show that the system can meet the dynamic performance need for motion compensation and indicate that the scheme is feasible and practical.
出处 《红外与激光工程》 EI CSCD 北大核心 2011年第3期539-543,共5页 Infrared and Laser Engineering
基金 中国科学院知识创新工程青年人才领域前沿资助项目
关键词 像移补偿 成像光谱仪 压电陶瓷驱动器 高频 motion compensation spectrograph PZT actuator high frequency
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