摘要
利用直流磁控溅射工艺,在水冷玻璃衬底上成功沉积出了高透光、低电阻率的Ti-Al共掺ZnO（TAZO）透明导电薄膜。X射线衍射（XRD）研究结果表明,TAZO薄膜为具有c轴择优取向的六角纤锌矿结构多晶薄膜。研究了TAZO薄膜的应力、结构以及光电性能与薄膜厚度的关系,结果表明,当薄膜厚为531 nm时,薄膜晶格畸变最小,具有最小压应力（绝对值）0.726 6 Gpa,同时具有最小电阻率3.35×10-4Ω.cm,其光学带隙大约为3.58 eV。所制备薄膜附着性能良好,在波长为400~760 nm波段的可见光中平均透过率都超过了91%。
The transparent conducting Ti-Al codoped zinc oxide（TAZO） films with high transparency and relatively low resistivity have been successfully prepared by direct current magnetron sputtering.Stress,micro-structural and optic-electrical properties of TAZO films were studied.The XRD results show that all the deposited films are polycrystalline with a hexagonal structure and a preferred orientation perpendicular to the substrates along the c-axis.The stress and the electrical resistivity decrease when the thickness increases from 133 nm to 531 nm.When the thickness is 531 nm,it is obtained that the lowest stress is 0.726 6 GPa and the lowest resistivity is 3.35×10-4 Ω·cm.The stress and electrical resistivity increase when the thickness increases from 531nm to 698 nm.All the films present a high transmittance above 91% in the visible range.The optical band gap of TAZO films is about 3.58 eV.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2011年第3期400-403,共4页
Journal of Optoelectronics·Laser
基金
山东省自然科学基金资助项目(ZR2009GL015)
