摘要
针对合成孔径激光雷达光源调腔用压电换能器(PZT)长度位移进行高精度测量的需要,提出一种基于干涉图像灰度最佳估计的双光束干涉测量方法。通过合理设计算法,理论上测量分辨率能够达到光源激光器波长的1/1 024;实验上对一管型PZT的长度位移进行了测量,精度达到10 nm量级。
The piezoelectric transducer（PZT）is a key component for variable-cavitylength laser in synthetic aperture laser radar systems.So it is necessary to measure the displacement of PZT with a high accuracy.A novel method using double-beam interferometry based on the best estimation of pattern gray scale was proposed.Through designing the estimation algorithm in the method,it was theoretically possible to get the measuring accuracy order to 1/1 024 of the laser wavelength.The experimental results from a PZT pipe measurement show that with the proposed method a 10 nm order accuracy can be obtained.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2011年第2期166-169,共4页
Journal of Optoelectronics·Laser
基金
国家"863"计划资助项目(2006AA12Z144)
关键词
合成孔径雷达
压电换能器(PZT)
双光束干涉
数字图像处理
synthetic aperture radar
piezoelectric transducers（PZT）
double-beam interferometry
digital image processing
