摘要
制备条件对FeCoN薄膜的结构与磁性有重要的影响．选择合适的基片温度和退火方式，可以用溅射方法制备出具有高饱和磁化强度的FeCoN薄膜．
The structure and magnetic properties of FeCoN films were influenced by the substrate temperature and annealing conditions. FeCoN films with high saturation magnetization can be prepared by choosing proper subStrate temperature and annealing treatment. The α'-(Fe,Co)16N2 in FeCoN films with 12% Co (mass fraction) has the same structure as the α'-Fe16N2 phase, and Co addition does not reduce the high saturation magnetization of the α' phase.
出处
《材料研究学报》
EI
CAS
CSCD
北大核心
1999年第3期255-260,共6页
Chinese Journal of Materials Research
基金
国家自然科学基金!59802005
清华大学理学院基金
关键词
薄膜
结构
磁性
退火
铁钴氮薄膜
FeCoN thin film. structure, magnetic property, annealing treatment
