摘要
报道了４１０ｍｍ轻型熔石英反射镜的研制概况。首先分析了轻型反射镜对材料的要求，选择了熔石英作主反射镜材料。比较了熔石英反射镜轻量化技术途径的优缺点，选择了高温熔合物封接的技术方案，研究了封接材料和高温熔合物封接技术。开展了有限元结构分析，分析了支撑方式和若干参数对反射镜面形的影响，确定了合理的结构参数。应用上述研究结果研制出４１０ｍｍ轻型球面熔石英反射镜和３５０×２４８ｍｍ异型轻型平面熔石英反射镜。研究了高温１５０℃，低温－３５℃对４１０ｍｍ轻型熔石英反射镜面形稳定性的影响，研究结果实际表明实验前后面形均方根变化ΔＲＭＳ＜０．０１λ（λ＝６３２．８ｎｍ），说明面形和结构十分稳定。
The general situation of the development of φ410mm lightweight fused silica mirror is reported in the paper.First we analyzed the requirements of the lightweight mirror and chose fused silica as the main material of the mirror.Then we compared the advantages and disadvantages of various lightweight technical approaches of fused silica and chose the technical concept of high temperature fusion bonding and the bonding technology.The supporting mithod and some factors which will affect the figure of the mirror are analyzed with finite element structure analysis,and the reasonable structural parameters are determined.φ410mm lightweight spherical fused silica mirror and 350×248 mm special shaped lightweight plane fused silica mirror have been developed with the above research results.The effects of 150℃ high temperature and -35℃ low temperature on the stability of figure of φ410mm lightweight fused silica mirror are investigated.Before and after experiment the RMS values of figure variation are ΔRMS< λ(λ =632.8nm).This whows that its figure and structure are very stable.
出处
《光电工程》
CAS
CSCD
1999年第1期27-35,共9页
Opto-Electronic Engineering
基金
863高技术研究计划资助
关键词
轻质反射镜
球面镜
熔石英反射镜
Lightweight mirrors,Spherical mirrors,Fused silica mirrors. Classification number TQ171.73
