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氧化铝陶瓷基片CO_2激光钻孔最佳条件之探讨 被引量:8

Investigation of Optimized Drilling Conditions of Al 2O 3 Ceramic Plate by CO 2 Laser
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摘要 利用CO2激光连续脉冲频率的快慢,平均功率的大小,加上辅助空气吹气压力的变化及其之间的交互作用。 CO 2 laser is a desirable tool to drill ceramics such as Al 2O 3. Drilling of Al 2O 3 ceramics has several problems to be solved: such as high melting point, high hardness degree and crack coming from thermal shock. This study investigates the influence of factors such as frequency of pulses, laser average power and the pressure of assistant air on the quality of drilling. Their mutual influence on the hole size is discussed.
出处 《中国激光》 EI CAS CSCD 北大核心 1999年第5期449-454,共6页 Chinese Journal of Lasers
关键词 CO2激光 钻孔 氧化铝陶瓷片 激光加工 CO 2 laser, drilling, Al 2O 3 ceramic plate
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参考文献1

  • 1Wei P S,J Heat Mass Transfer,1990年,33卷,10期,2207页

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