摘要
用电子激发方法对SSRF储存环初步选定的真空室材料的动态出气特性进行了实验研究 ,得到了主要解吸气体成分的电子激发解吸系数与电子入射累积剂量的关系 ,对真空室材料经不同表面处理后的电子激发解吸特性进行了比较 ,初步确定了该真空室的表面处理工艺 。
The dynamic outgassing characteristics stimulated by electrons have been experimental investigated for the vacuum chamber materials to be used in the SSRF storage ring.The ESD gas yield as a function of the integrated electron dose has been obtained.The ESD characteristics of samples treated with differential process have been compared.The treatment process for vacuum chamber has been preliminary determined.This work will provide some experimental basis for the construction of SSRF UHV system.
出处
《真空科学与技术》
CSCD
北大核心
1999年第2期102-107,共6页
Vacuum Science and Technology
