摘要
用射频磁控溅射方法制备了纯氧化锌（ＺｎＯ）薄膜和掺Ａｇ、掺Ｐｔ与掺Ｐｄ的 ＺｎＯ三种气敏光学薄膜．测量了这些薄膜在 ＮＯ_ｘ气体中的透射光谱，然后由透射光谱获得了灵敏度的变化规律，并用吸附平衡关系式解释了气敏光透射特性，最终优化得到一种对 ＮＯ_ｘ气体灵敏度高的掺Ａｇ氧化锌薄膜．
Pure ZnO thin film is deposited by r. f. magnetron sputtering technique as well as three other gas sensing optical thin films, e. g., Ag-doped, Pt-doped and Pd-doped ZnO films. The transmission spectra to NO_x of these films are measured at first, then the variation of sensitivity is derived from the transmission spectra. The gas sensing transmission properties are analyzed by considering the adsorption equilibrium relation. An Agdoped ZnO thin film, with high sensitivity to NO_x is eventually obtained by optimizing the deposition process.
出处
《传感技术学报》
CAS
CSCD
1999年第2期123-126,共4页
Chinese Journal of Sensors and Actuators
