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Nanoscale strained-Si MOSFET physics and modeling approaches:a review

Nanoscale strained-Si MOSFET physics and modeling approaches:a review
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摘要 An attempt has been made to give a detailed review of strained silicon technology. Various device models have been studied that consider the effect of strain on the devices, and comparisons have been drawn. A review of some modeling issues in strained silicon technology has also been outlined. The review indicates that this technology is very much required in nanoscale MOSFETs due to its several potential benefits, and there is a strong need for an analytical model which describes the complete physics of the strain technology. An attempt has been made to give a detailed review of strained silicon technology. Various device models have been studied that consider the effect of strain on the devices, and comparisons have been drawn. A review of some modeling issues in strained silicon technology has also been outlined. The review indicates that this technology is very much required in nanoscale MOSFETs due to its several potential benefits, and there is a strong need for an analytical model which describes the complete physics of the strain technology.
出处 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2010年第10期19-23,共5页 半导体学报(英文版)
关键词 MOBILITY SIGE STRAINED-SI technology CAD mobility SiGe strained-Si technology CAD
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参考文献39

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