摘要
利用直流反应磁控溅射技术,在玻璃衬底上制备了氧化银薄膜。X射线衍射和扫描电子显微镜表明制备的氧化银薄膜主要由Ag和Ag2O组成,具有疏松、多孔的表面特征。制备的氧化银薄膜经过5 min光快速热处理后,薄膜由多晶转变为非晶;随着退火温度由200℃升高到300℃,氧化银薄膜表面由疏松、多孔结构向沟道、坑和孔洞联通结构,再向孔洞和洼地结构演变。这些演变归结为氧化银薄膜的不稳定性和严重的表面再构的结果。
Porous silver oxide thin films were deposited on glass substrate by DC reactive magnetron sputtering process.Characterized by SEM and XRD,it was found that the films are mainly composed of Ag and Ag2O with porous surface morphology.After 5min rapid photothermal annealing,the films prepared change into amorphous from polycrystal structure and,along with the annealing temperature increasing to 300 ℃ from 200 ℃,the surface morphology of the films evolves into holes and depressions from pits and pores connected with grooves.Such an evolution is attributed to the instability and strong surface restructuring of the porous silver oxide thin films.
出处
《真空》
CAS
北大核心
2010年第5期13-15,共3页
Vacuum
基金
国家自然科学基金(No
60807001)
郑州大学大学生创新基金(No
A196)
关键词
氧化银薄膜
磁控溅射
光快速热处理
多孔薄膜
silver oxide thin film
magnetron sputtering
rapid photothermal annealing
porous thin film
