摘要
介绍微热板式微气压传感器的工作原理,微热板式微气压传感器的方案和采取的测试系统控制策略。其中,模糊控制理论在真空控制中的应用为模糊控制器和微热板式微气压传感器的自动测控系统的设计,提供了一定的技术支持,为传感器的性能测试提供良好的实验平台和理论基础。
This article describes the decline of the micro-hot plate of the working principle of air pressure sensors,as well as its basic characteristics.At the same time,the introduction of micro-hot-plate test the decline of pressure sensors,as well as a result of the test system to take control strategy.Fuzzy control theory is applied to vacuum control,the design of a fuzzy controller,the establishment of a micro-hot plate of the automatic decline of pressure sensor measurement and control systems,provide some technical support sensors for in-depth performance testing carried out to provide a good experimental platform and theoretical foundation.
出处
《煤炭技术》
CAS
北大核心
2010年第8期50-51,共2页
Coal Technology
关键词
传感器
测控系统
模糊PID控制
sensor
monitoring and control system
fuzzy PID control
