摘要
利用扫描电镜和能谱仪对金属化后95瓷表面出现的黑点进行了定性和半定量分析。结果表明黑点主要有三类,并分别对其成因进行了探讨。
The maculae of metalized 95% alumina ceramics were analyzed qualitatively and quasi-quantificationlly by scanning electron microscope and energy disperse spectroscopy.The results show that there were three kinds of maculae： only including element C,including impurity elements else except element C and hardly including any impurity elements.In addition,the formation reasons of maculae were discussed respectively.
出处
《真空电子技术》
2010年第3期43-46,共4页
Vacuum Electronics
