摘要
本文报道了纳米微孔ＳｉＯ２薄膜的溶胶－凝胶（ｓｏｌ－ｇｅｌ）制备工艺，利用椭圆偏振光测试仪（Ｅｌｉｐｓｏｍｅｔｅｒ）直接测量了薄膜的厚度、折射率，从而得到了ＳｉＯ２薄膜的气孔率及气孔大小分布。
In this paper,we have reported the fabrication techniques of nanometer porous silica thin films prepared by the sol-gel method.Thickness,refractive indices,porosity and pore size distribution have been characterized by the molecule probe ellipsometry technique.The effect of fabrication conditions and surface treatment after annealing on the porosity and other properties have been also discussed in this paper.
出处
《功能材料》
EI
CAS
CSCD
北大核心
1999年第2期190-192,共3页
Journal of Functional Materials
基金
英国帝国理工学院访问学者基金
