摘要
本文采用测光谱强度推算透过率的方法,对光栅光强透过率分布规律进行了研究。文章列举了几种振幅光栅的母板、复制品、正弦光栅及其复制品的测量数据和推算结果,并引出若干值得进一步探讨的问题。
In recent years more and more applications are reported about metrology grating, however, almast all the papers were limited to the testing of its accuracy, drift of DC level and phase. As to the testing of its transmission function, nothing more except those theoretical analyses wcre reported. Therefore, a method for calculation of grating transmission distribution by determining its spectral intensity is described here, and the testing data and calculated results about Ronchi-gratings, sine-gratings and their replicated gratings are thcoretically analyzed and calculated. some other problems are also discussed in this paper. With the need for technology and application of gratings, it is necessary to explore further in this field.
关键词
光栅
透过率
测试
光谱强度
Grating
Light intensity transmission
testing
