摘要
研究了用PCVD法所制备的TiN，TiAlN和TiSiN硬质涂层的抗高温氧化性能及TiN涂层在双氧水介质中的抗氧化性能。结果表明，TiAlN，TiSiN涂层在空气中的抗高温氧化温度达700℃以上，TiN涂层可达600℃。在双氧水介质中，PCVD－TiN涂层仍具有较强的抗氧化能力，且优于PVD－TiN涂层。
The high temperature oxidation resistance of TiN, TiAlN and TiSiN coatings prepared by plasma chemical vapor deposition was studied. the TiN and TiAlN or TiSiN could be heated to 600℃ and 700℃ respectively without obvious changes. The experimental results also showed that the HSS samples with TiN coating could not be corroded in H2O2 solution.
出处
《材料保护》
CAS
CSCD
北大核心
1999年第1期34-36,共3页
Materials Protection
