摘要
阐明微型机械新型学科的内涵和广阔的应用前景。综述美、日等发达国家从事微型机械的研究与开发状况和国内微型机械的研究现状。提出了推动我国微型机械快速发展的建议。
The connotation and the wide applications of MEMS, the new field. were illustrations. It overviews R&D situation on MEMS in American, Japanese, China and other develop countries. It then gave some suggestions for promoting our MEMS rapidly.
出处
《中国机械工程》
EI
CAS
CSCD
北大核心
1999年第2期121-122,206,共3页
China Mechanical Engineering
关键词
微型机械
研究现状
发展建议
Micro Electro Mechanical Systems (MEMS) current research situation develop suggestions
