摘要
本文介绍以８０３１单片机为核心研制成的衍射光栅刻划机的开环控制的高精度定位系统。系统中采用了光栅干涉仪、程控放大器、干涉条纹细分和马达分级调速等方法，本系统既具有闭环控制的高精度特点，又具有开环控制简单、易操作等优点。实用表明：该系统控制的刻划机的定位精度σ＝３．６ｎｍ，最大定位误差为１４．６ｎｍ。
A high precision open loop control positioning system for a diffraction grating ruling machine is deve loped and presented in this paper, which takes a 8031 single chip microcomputer as the nucleus and adopts a series of techniques such as grating interferometer, program control amplifier and interference fringes sub division as well as motor velocity step governing. The system provides not only with feature of the high precision of a closed loop control system, but also with feature of the simplicity and convenience of an open loop control system. Experiments show that the positioning precision of the diffraction grating ruling machine controlled by this system is σ=3.6nm, the maximum positioning error is less than 14.6nm.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
1999年第1期63-67,共5页
Chinese Journal of Scientific Instrument
