摘要
基于扫描探针显微镜(SPM)微机械性能测试的需求,设计了一种可用电容力驱动微桥面振动的新型微桥。通过实验选材和单晶Si的刻蚀研究,提出了一种新的正面刻蚀成桥方法,获得了一种基于湿法刻蚀的低成本、易加工的实用微桥加工技术。利用SEM和AFM观察了微桥,证实微桥已制备成功且微桥桥面形貌比较平整。最后用改进的扫描隧道显微镜(STM)测量了微桥振动的频率响应,测得的共振频率与理论估算值基本一致。
An electrostatic force driving microbridge was prepared and its mechanical resonance was detected by scanning probe microscope.An alternately isotropic and anisotropic wet etching process of silicon were used to realize the gap between a chromium bridge and the heavy doped silicon substrate in the underneath.The SEM and AFM images reveal the dimensions and surface roughness of the prepared microbridge.Finally,the resonance frequency is measured using a scanning tunneling microscope（STM）,and the result is in consistence with that by theoretical analysis.
出处
《半导体技术》
CAS
CSCD
北大核心
2010年第6期584-588,共5页
Semiconductor Technology
