摘要
介绍了软X射线Bragg Fresnel光学元件的特点 ,并以磁控溅射法制备多层膜 ,再采用光学全息方法在涂有光刻胶的多层膜表面上形成波带片图形 ,通过显影。
Soft X ray Bragg Fresnel optics devices were successfully fabricated.First,Mo/Si multilayer mirrors were prepared by magnetron sputtering.Next,patterns of the Bragg Fresnel optics device were made on the multilayer mirrors by laser holography.Finally,Bragg Fresnel optics devices were fabricated by ion beam milling.Their properties and potentials were also discussed.
出处
《真空科学与技术》
CSCD
北大核心
1999年第1期66-69,共4页
Vacuum Science and Technology
基金
国家自然科学基金
"863"激光领域青年基金
应用光学国家重点实验室基金资助课题
关键词
软X射线
光学元件
多层膜
光学全息法
B-F元件
Soft X-ray Bragg-Fresnel optics device,Multilayer film,Zone plate,Ion beam etching
