摘要
简要叙述了Ｘ射线反射式衍射光学元件──Ｂｒａｇｇ－Ｆｒｅｓｎｅｌ多层膜元件产生和发展的过程。介绍了它的基本原理及它的设计和制作步骤。对其应用前景作了简要分析，并对开展这方面的研究工作提出了一些设想。
This puper discribes the so--called Bragg-Fresnel structure which combines the Braggreflection of multilayer with Fresnel diffraction of zone plate. In soft X--ray wavelengthregion such structures have both high reflectance and spatial resolution, it might beemployed, therefore, as imaging and/or dispersing elements in optical systems. Themethods of design and manufacture are briefly introduced with an essential research project.
出处
《光学精密工程》
EI
CAS
CSCD
1996年第2期1-6,共6页
Optics and Precision Engineering
基金
国家自然科学基金
关键词
多层膜
刻蚀
X射线
光学元件
衍射
反射
Multilayer, Etching, Bragg reflection on the multilayer, Fresnel diffracting effect
