摘要
设计了一种微波离子源的聚焦离子束光学系统，分析计算了该光学系统的束径，并数值模拟了由空间电荷作用造成的束径增宽效应，找出了影响束斑大小的主要因素和减小束径的方法。测试结果表明，在束能为２５ｋｅＶ时，束流为１４８ｎＡ，束径约为２０μｍ左右。
A focused ion beam optical column with microwave ion source used formicrofabrication of cells is described in this paper. Both analytic calculation of beamdiameter in the column and numerical simulation of space- charge-induced beambroadening were made, and main factors influencing beam size and methods ofreducing the beam spot were found. By this system, a 25keV N+ beam of about 20 mdiameter with 148nA current was finally achieved when the aperture diameter was0. 1mm.
出处
《核技术》
CAS
CSCD
北大核心
1999年第1期17-23,共7页
Nuclear Techniques
基金
国家"八五"重点科技攻关项目
