摘要
为提高光学材料的研磨效率与质量,提出一种亲水性固结磨料研磨方法。采用图形转移与UV固化工艺,将粒径为5～10μm的金刚石磨料固结于亲水性光固化树脂中,制备固结磨料研磨抛光垫(FAP)。选取工件的材料去除率(MRR)和表面粗糙度(Sa)来评价研磨的加工性能。对比研究了在相同粒径磨粒下的游离磨料研磨、固结磨料丸片研磨、及亲水性FAP研磨三种不同方法对K9光学玻璃的加工性能。实验结果表明:采用FAP研磨K9玻璃,MRR为350nm/min,表面粗糙度Sa为3.24nm,达到了精研的加工效率和抛光的表面质量。提出了固结磨料抛光丸片和亲水性FAP的加工模型,以及亲水性FAP的自修整机理。
In order to improve lapping efficiency and quality of optical materials,a method of hydrophilic fixed abrasive pad （FAP） lapping was introduced. The fixed abrasive pad embedded with diamond abrasives which had a diameter of 5-10 μm was developed through pattern transfer and UV-curing process. Material Removal Rate （MRR） and average surface roughness （Sa） were employed to evaluate the performance of lapping or polishing. The conventional lapping,fixed abrasive pellet lapping,and hydrophilic FAP lapping of K9 glass with the same particle size abrasives were compared. Results show that the MRR of hydrophilic FAP lapping is 350 nm/min and the average surface roughness Sa is 3.24 nm. Both of the two parameters achieve the quality of finish lapping and polishing. Material removal models of fixed abrasive pellet and hydrophilic FAP are concluded through the experiment results. Besides,self-conditioning mechanism of hydrophilic FAP lapping is obtained.
出处
《硅酸盐通报》
CAS
CSCD
北大核心
2010年第1期6-11,共6页
Bulletin of the Chinese Ceramic Society
基金
国家自然科学基金(50675104)
江苏省六大人才高峰基金(06-D-024)
江苏省精密与微细加工重点实验室基金(JSPM200707)资助项目
关键词
亲水性
固结磨料抛光垫
材料去除率
自修整
hydrophilic
fixed abrasive pad （FAP）
material removal rate （MRR）
self-conditioning
