摘要
仅就“绝对真空计量标难”略加评论，对真空计量标准的“绝对性”含义作一讨论。随着真空度的提高，真空度计量标准的绝对性越来越下降；相对真空度计量标准而言，气体微流量标准的绝对性还要更差些。
In the paper, the meaning of absolute measurement standard in vacuum metrology was discussed and some absolute measurement standards were reviewed. The absoluteness of vacuum standard deteriorates with lowering of its pressure. The absoluteness of gas flow standard is worse than that of the vacuum standard.
出处
《真空科学与技术》
CSCD
北大核心
1998年第3期202-205,共4页
Vacuum Science and Technology
