摘要
用流体动力学方法研究了射频放电的动态演变过程．得到了粒子密度、电子能量和电场的动态分布图．通过对功率密度的推导和鞘层厚度的定量定义，发现两者之间存在一定的函数关系．此外，动态分布图还表明：放电的演变主要发生在鞘层内部，两鞘层的演变相差１８０°相位角，极板材料对放电有影响．
The dynamic evolution of the RF discharge is studied with hydrodynamic method. The profiles of the dynamic distributions of particle densities, the electron energy and the electric field are obtained. It is found that there exist certain functional relationships between the power density and the sheath depth. Besides, the profiles show that the evolution occurs mainly inside the sheath, and there is a phase shift of 180° between two sheaths. The electrode material shows also some influences on the discharge.
出处
《华中理工大学学报》
CSCD
北大核心
1998年第A01期34-36,共3页
Journal of Huazhong University of Science and Technology
