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自由曲面光学的超精密加工技术及其应用 被引量:27

Ultra-precision machining technology of freeform optics and its applications
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摘要 突破传统光学成像系统设计理论和方法,将自由曲面引入光学成像系统中,极大地提高了系统的成像质量和能量的传输效率;采用先进数控超精密制造技术加工自由曲面光学元件,解决了自由曲面光学元件加工的技术瓶颈。开发了自由曲面控制网格的节点矢量的精确计算方法,以及多轴超精密数控加工光学自由曲面的自动编程及其刀具轨迹仿真系统,建立了自由曲面三维拓扑预测模型与优化系统,研发了多个自由曲面测量及评估方法,并搭建了自由曲面光学设计、加工、测试一体化的集成平台。上述核心技术有助解决国际上对复杂自由曲面光学元件在超精密加工及纳米级表面测量中的关键技术难题。研究成果推动了超精密加工及纳米测量领域内的技术进步。 As a breakthrough to the traditional optical design,the application of freeform surface in optical imaging system had greatly improved the imaging quality and transmission efficiency of the optical system.Ultra-precision machining technology provided the solutions to the fabrication of freeform optical element.In the present study,a high precision computation method had been developed to calculate the control points for freeform surface.A tool path generation module was developed for freeform surfaces,as well as an auto NC code generation system.A model-based system was built-up to predict the 3D topography of the surface generation and hence the optimization module was developed to achieve the better surface finish and form accuracy.A series of methods were developed to measure and evaluate the quality of different types of freeform surfaces.Based on the above research results,an integrated system for optical design,fabrication and measurement of freeform optics was established.The present research work will contribute to and advance the development of ultra-precision machining and nano-scale surface measuring of complex freeform surfaces element.
出处 《红外与激光工程》 EI CSCD 北大核心 2010年第1期110-115,共6页 Infrared and Laser Engineering
基金 香港理工大学研究资助基金项目(G-U278)
关键词 光学自由曲面 超精密加工 曲面测量 光学设计 集成系统 Freeform optics Ultra-precision machining Freeform measurement Optical design Integrated system
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参考文献13

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