摘要
在激光雷达等领域,通常希望激光光束实现低转动惯量高频率匀速扫描,而目前光束扫描器(如检流计式振镜、多面转镜等)很难达到这种要求,为此设计了一种基于新型压电驱动器的激光扫描器。激光扫描器基于一对新型的位移放大压电驱动器,有限元分析结果表明这种压电驱动器具有比传统杠杆式位移放大压电驱动器更好的高频特性。采用软件补偿和串联硬件陷波器相结合的开环控制方法,补偿压电陶瓷迟滞效应影响和抑制机械谐振,提高了扫描线性度,实现了高频三角波扫描。该扫描器还具有转动惯量低、体积小,结构简单、功耗低等优点。
In the area of the laser radar,the laser beam needs to be scanned in uniform speed with low moment of inertia and high frequency.However,the currently existing laser scanners（such as vibration galvanometer-type mirror,multi-faceted rotating mirror） are difficult to achieve such performances.In order to solve these problems,a laser scanner based on novel piezoelectric actuators was designed.This laser scanner was actually driven by a pair of novel amplified piezoelectric actuators.The finite element analysis results show that the high frequency response of the novel piezoelectric actuator is better than that of the traditional lever type actuator.The linearity of the open loop scanning is improved by combining the software,which compensates the hysteretic behavior of the piezoelectric actuator,and the notch filter circuit that restrains the structure resonance of the scanner.The experimental results have demonstrated high frequency scanning in uniform speed.The scanner has other advantages such as low moment of inertia,small size,simple structure,and low power consumption.
出处
《红外与激光工程》
EI
CSCD
北大核心
2010年第1期67-70,75,共5页
Infrared and Laser Engineering
基金
教育部新世纪优秀人才支持计划(NCET-07-0319)
关键词
激光扫描器
位移放大压电驱动器
机械谐振
迟滞效应
陷波器
Laser scanner
Amplified piezoelectric actuator
Structure resonance
Hysteretic behavior
Notch filter
