摘要
采用阴极电弧结合离子源辅助磁控溅射复合技术,充分利用薄膜组成多元化、晶体纳米化、组成和结构多层化、梯度化的优势,分别制备了多元素复合过渡层缓冲的钨元素梯度掺杂的和Cr元素纳米多层调制的类金刚石(DLC)薄膜,研究掺杂元素含量和调制层厚度对薄膜组成与结构、力学性能和摩擦磨损性能的影响。梯度掺杂、多元、多层结构降低了DLC膜和钢基体之间因组成和结构不同产生的应力,改善了膜基结合力,材料综合耐磨损性能大幅度提高。
Graded tungsten–doped diamond–like carbon （DLC） composite thin films and nanoscale multilayered chromium modulated DLC composite thin films with multicomponent transition layers were fabricated, respectively, by using cathodic vacuum arc and ion beam assisted DC magnetron sputtering technique, and the influences of the doped amount of metal W and the individual thickness of Cr modulation layer on the composition, structure and properties of the as–prepared DLC film samples were investigated. It was found that the adhesion strengths between the films and substrates of both kinds of samples were dramatically enhanced due to the alleviation of their intrinsic compressive stresses through multicomponent and multilayered structure, and the comprehensive wear–resistant properties of the as–prepared samples were obviously improved.
出处
《中国表面工程》
EI
CAS
CSCD
北大核心
2010年第2期36-41,共6页
China Surface Engineering
基金
科技部重大国际科技合作项目(2006DFB51260)
关键词
复合镀膜技术
DLC薄膜
掺杂
摩擦学性能
hybrid coating technology
diamond–like carbon film
doped
tribological property
