摘要
机械导轨运动副滚转角的高精度测量一直是一个难题。研究了很多光学方法,但由于其角位移方向正好垂直于探测光束,所以仍没有得到很好的解决。利用激光偏振面对旋转的敏感性,通过测量由此引起的正交偏振激光光强、相位或频差的变化,可有效地解决滚转角的测量问题。介绍了目前国内外基于正交偏振激光的滚转角测量技术,根据其测量原理分为光强差测量、相位差测量和频率差测量三类。对每种测量方法的原理和发展现状进行了评述,比较了各种方法的优缺点,讨论了其发展趋势。
The high precision measurement of the rolling angle of the moving mechanism guide is very difficult to be carried out because its angular displacement is perpendicular to the incident probe beam.Due to the sensitivity of laser polarization to the rolling displacement,variations of intensity,phase and beat frequency of the orthogonally polarized lasers can be measured to effectively solve the rolling angle measuring problem.Several rolling angle measuring methods are introduced and classified into three groups：based on intensity difference,phase difference,frequency difference measurements.The principle and the status of development of each method are described.The advantages and disadvantages are compared.The developing trend of these methods are discussed.
出处
《光学技术》
CAS
CSCD
北大核心
2010年第2期193-199,共7页
Optical Technique
基金
国家自然科学基金(30870662)资助项目
北京市自然科学基金(09C0098)资助课题
关键词
光学测量
角度测量
正交偏振激光
滚转角
optical measurement
angle measurement
orthogonally polarized lasers
rolling angle
