摘要
一定能量密度的准分子激光作用于掺杂ＳｎＯ２烧结型气敏元件敏感材料表面后，元件性能发生了显著的变化。元件电阻和对气体的灵敏度比作用前有明显的增加，同时材料表面颜色也发生了变化。分析认为该过程是由于短脉冲的准分子激光作用，使ＳｎＯ２材料快速升温熔化并快速冷凝重构，导致表面变性，从而引起材料电性能和气体敏感性能的变化。
The properties of a doping SnO 2 sintered gas sensor change remarkably if the surface of its sensing material is irradiated by a certain amount of proper-fluence excimer laser.Sensor's resistance and sensitivity are improved while the color of its surface also changes.It is observed that the changes take place when the proper-fluence excimer laser pulse irradiates the surface of SnO 2 material because of the temperature increase.As a result,the thin layer of the irradiated area is melt rapidly and soon resolidified,which leads the variation of surface behavior,as well as electric and gas sensing properties.
出处
《半导体光电》
CAS
CSCD
北大核心
1998年第6期390-392,共3页
Semiconductor Optoelectronics
基金
云南省国际合作项目
