摘要
讨论了一种扭摆式微机械加速度计。介绍了它的敏感元件的结构尺寸、振动模态以及数学模型。阐述了位移检测电路的原理和要求，以及满足这些要求所采用的技术措施。推导了这种加速度计的敏感元件和位移检测电路的灵敏度公式。叙述了敏感元件的体硅溶解薄片法制造工艺。从热噪声和电噪声两方面分析了这种加速度计的精度极限，相对于当地重力加速度应该能达到１０－５。但是，试验样机的初步实验结果表明，目前精度只有１０－２～１０－３，因此，还有巨大潜力。
To discusse one type of micromechanical accelerometers with torsional pendulum. The construction dimension, vibration modes and mathematical model of its sensitive element are introduced. The principle, requirement and techniques satisfying with this requirement of displacement detection circuits are described. The sensibility formulations of the sensitive element and displacement detection circuits of the accelerometer are derived respectively. The fabrication techniques with dissolved wafer process of sensitive element are expressed. From both of heat noise and electrical noise, the limitations of its accuracy are analyzed. The accuracy should be about 10 -5 relative to gralitational acceleration ( a/g ). According to the preliminary testing result of the prototype, its accuracy of a/g is only 10 -2 ￣10 -3 . Therefore the potential is quite significant.
出处
《清华大学学报（自然科学版）》
EI
CAS
CSCD
北大核心
1998年第11期4-8,共5页
Journal of Tsinghua University(Science and Technology)
基金
国防科工委重点预研项目
