摘要
针对同一工艺流程下相同杨氏模量和残余应力的双端固支梁阵列,建立了简化的杨氏模量和残余拉应力的弯曲测试模型,并将应力刚化理论应用到几何非线性有限元分析中用于上述模型的理论误差评价。提出将拉曼频移测试与原子力显微镜(AFM)弯曲测试相结合的实验方案,首先利用拉曼频移判断结构中的应力拉压性质,随后利用AFM测量梁阵列的弹性系数,最终利用MATLAB求解超定方程组的方法解得梁阵列的杨氏模量和残余应力,测试结果证明了该实验方案的可行性。
A simplified bending test model of Young＇s modulus and residual stress is set up for fixed-fixed beam array fabricated in one process with same Young＇s modulus and residual stress. Stress strengthening theory is applied in the geometry-nonlinear finite element model so as to estimate the theoretical errors of the bending model. An experimental strategy of combining Raman shift test and AFM bending test is brought forward. The tensile or compressive property of the residual stress in the measured structure is judged using the value of Raman shift, and then the spring constants of the measured structures are measured using the force curve mode of AFM. Finally, a program for solving the overdetermined equation realized by MATLAB is used for the calculation of the values of Young＇s modulus and residual stress. Experimental results illustrate the feasibility of the proposed model and the corresponding experimental strategy.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2010年第1期201-207,共7页
Chinese Journal of Scientific Instrument
基金
科技部国际科技合作与交流专项(2008DFA71610)
国家自然基金重点(50535030)
