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工具显微镜测量结果的不确定度评定

Uncertainty Evaluation on Measurement Results of Toolmaker's Microscope
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摘要 采用工具显微镜对某毫米玻璃刻度尺进行了校准测量,对影响测量结果的不确定度分量进行了分析,并对不确定度的各个分量进行了计算和合成,最后给出了该工具显微镜测量结果的不确定度报告:当测量点为10 mm时,10次测量的算术平均值L=10.000 24 mm;扩展不确定度U_=0.84μm,有效自由度v_(off)=20。 Millimeter glass size ruler were measured and calibrated with toolmaker' s microscope, and uncertainty components which affected the measurement result were analyzed, calculated and synthesized. Finally the uncertainty report for measurement results of the toolmaker's microscope was given. When the measurement point was 10 ram, the average measured length ^-L=10.00024mm, expanded uncertainty U95=0.84μm, effective degree of freedom υeff= 20.
出处 《理化检验(物理分册)》 CAS 2009年第12期748-750,753,共4页 Physical Testing and Chemical Analysis(Part A:Physical Testing)
关键词 工具显微镜 测量结果 不确定度评定 toolmaker's microscope measurement result uncertainty evaluation
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