摘要
提出了一种新型的非接触电容式小孔孔径测量方法,设计了专用测头,组建了小孔孔径自动测量系统。该系统采用视觉CCD和二维微调整机构,实现了精确的定位。用VC++6.0开发了应用软件,用来控制系统的自动运行,并完成标定、数据采集和数据处理。实验结果表明:此系统分辨率可以达到0.5μm,重复性实验标准差可以达到0.81μm。
A high-precision, non-contact capacitance measuring method for pinhole diameter is introduced, and a special probe is designed. An automatic measuring system for pinhole diameter is formed. The system uses vision CCD and a two-dimensional micro-adjusting instrument to achieve precise position. The software is completed with VC ＋ ＋6.0 ,which can control to run automatically and compelete experimental data acquisition, calibration and data processsing. Experiments show that the resolution of this system is 0.5 μm and the standard deviation is 0.81 μm.
出处
《传感器与微系统》
CSCD
北大核心
2009年第12期14-16,共3页
Transducer and Microsystem Technologies
