摘要
针对高精度的大平面测量,构建了一种基于正弦调制的激光平面测量系统。该系统以激光器(LD)为光源,位置敏感探测器(PSD)为光电探测器,通过柱面透镜扩束获得测量基准平面—激光平面。分析了影响系统测量精度的主要因素,提出采用光源正弦调制的方法,以提高测量系统的抗干扰能力。实验结果表明:该系统具有较高的测量精度和输出稳定性。
Aimed at high-precision measurement for large plane, a laser measurement system for plane based on sine modulation is presented. In this system, LD is used as the light source and projected onto a piece of cylindrical lens. With direct beam expanding, the cylindrical lens transmits a kind of sectorial laser plane, that is, the reference plane for the measurement system. The position of laser plane is then detected by PSD. Some factors influencing the system accuracy are analyzed. To reduce the error caused by those factors, the method of LD sine modulation is proposed. Calibration and stability test are carried out. The experimental results show that the measurement system is of high precision and high stability.
出处
《传感器与微系统》
CSCD
北大核心
2009年第11期34-36,共3页
Transducer and Microsystem Technologies
关键词
平面测量
正弦调制
柱面透镜
激光平面
plane measurement
sine modulation
cylindrical lens
laser plane
