摘要
提出一种适应高频工作状态的压电薄膜泵结构，初步分析了所采用的锥形阀的工作原理与作用，设计了试验泵结构，加工了样机，通过试验证明了锥形阀的有效性，为进一步的研究打下了基础。
In this paper, a piezoelectric pump is proposed. It is suited for high frequency work condition. The working principle of taper valve is analyzed originally. The experiment pump is designed and a sample machine is produced. The effectiveness of taper valve is proved through experiment, and which can lay the foundations for the further study.
出处
《压电与声光》
CSCD
北大核心
1998年第5期300-303,346,共5页
Piezoelectrics & Acoustooptics
关键词
锥形阀
压电薄膜
泵
压电晶体
taper valve, piezoelectric membrane, pump
