摘要
利用高精度空气静压轴承和非接触位移传感器,设计了一套圆度测量系统,可以实现外圆柱面圆度的精密测量。该系统的圆度测量结果与英国Taylor Hobson公司的高精度圆度仪测量结果对比表明,可以达到0.1μm以下的测量精度。多次测量证明,该系统测量结果重复性好、可信性高。
The paper used high-precision air bearings and non-contact displacement sensor to design a system for measure circularity. The system （：an measure exact columnar surface.After comparing measurement result with the alike kind equipment of U.K. Taylor Hohson company, the result is appropinquity. The high-precision circularity measure system can attain 0.1μm measurement accuracy, the results have good repeatability and high creditability.
出处
《机械工程师》
2009年第11期54-55,共2页
Mechanical Engineer
关键词
空气轴承
圆度
测量
设计
air bearing
circularity
measure
design
