摘要
用数值模拟方法研究了聚焦离子束系统中微波离子枪的束光学性能.将离子枪看作由源等离子体极和Orloff-Swanson透镜组成的双级加速系统,分析了各参量对束发散特性的影响.结果展示出引出束光学主要取决于引出导流系数和电势分布,在一定条件下可获得发散度小的离子束.
The ion beam optics of a microwave ion gun for a focused ion beam (FIB) system is investigated numerically in this article. Considering the ion beam optics of the gun as a two-stage acceleration system consisting of plasma electrode and Orloff-Swason lens, effects of some primary parameters on the beam divergence are examined. The results show that beam divergence of the system depends mainly on the extraction perveance and voltage ratio, and a minimum beam divergence can be obtained under optimum conditions.
出处
《核技术》
CAS
CSCD
北大核心
1998年第10期593-598,共6页
Nuclear Techniques
基金
国家"八五"重点科技攻关资助项目
